Nano Factory Achieved by Focused Ion Beam

Focused Ion Beam Nano-structuring for Applications in Photonics

To date, nano-and micro-structuring has commonly been implemented by a combination of specifically optimized processes of electron-beam lithography and reactive ion etching, thus limiting the range of materials that can be structured to only a few. In this talk we will introduce focused ion beam (FIB) milling as an emerging technology that enables fast, reliable and well-controlled nanometer-si...

Focused Ion Beam Based Three-Dimensional Nano-Machining

In recent days, the micro/nano machining becomes an important process to fabricate micro/nano scale dimensional patterns or devices for many applications, especially in electrical and electronic devices. There are two kinds micro-machining in use. i) bulk micromachining, ii) surface micro-maching. In the case of bulk micromaching, the structures can be made by etching inside a substrate selecti...

Focused Ion Beam Lithography

An angled nano-tunnel fabricated on poly(methyl methacrylate) by a focused ion beam.

Angled nano-scale tunnels with high aspect ratio were fabricated on poly(methyl methacrylate) (PMMA) using a focused ion beam (FIB). The fabrication parameters such as ion fluence, incidence angle, and acceleration voltage of the Ga(+) ion beam were first studied on the PMMA surface to explore the formation of the nano-scale configurations such as nano-holes and cones with diameter in the range...

Tunable nano devices fabricated by controlled deposition of gold nanoparticles via focused ion beam

0167-9317/$ see front matter 2009 Elsevier B.V. A doi:10.1016/j.mee.2009.12.031 * Corresponding author. E-mail address: [email protected] (Z. Zalevsky) In this paper, we present the fabrication procedures as well as the preliminary experimental results of a novel method for significantly simplified deposition of charged nanoparticles at specific patterns based on focused ion beam (FIB) tech...